JPH061221Y2 - 清浄空気吹出ユニット - Google Patents
清浄空気吹出ユニットInfo
- Publication number
- JPH061221Y2 JPH061221Y2 JP1988006009U JP600988U JPH061221Y2 JP H061221 Y2 JPH061221 Y2 JP H061221Y2 JP 1988006009 U JP1988006009 U JP 1988006009U JP 600988 U JP600988 U JP 600988U JP H061221 Y2 JPH061221 Y2 JP H061221Y2
- Authority
- JP
- Japan
- Prior art keywords
- box
- blowing unit
- clean air
- clean
- air blowing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007664 blowing Methods 0.000 title claims description 10
- 239000012528 membrane Substances 0.000 claims description 11
- 238000004080 punching Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000428 dust Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 241000282414 Homo sapiens Species 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000012945 sealing adhesive Substances 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 230000035900 sweating Effects 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988006009U JPH061221Y2 (ja) | 1988-01-22 | 1988-01-22 | 清浄空気吹出ユニット |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988006009U JPH061221Y2 (ja) | 1988-01-22 | 1988-01-22 | 清浄空気吹出ユニット |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01110820U JPH01110820U (en]) | 1989-07-26 |
JPH061221Y2 true JPH061221Y2 (ja) | 1994-01-12 |
Family
ID=31209878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988006009U Expired - Lifetime JPH061221Y2 (ja) | 1988-01-22 | 1988-01-22 | 清浄空気吹出ユニット |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH061221Y2 (en]) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61157320A (ja) * | 1984-12-28 | 1986-07-17 | Fukuhara Seisakusho:Kk | コンプレツサ−に於ける除菌装置 |
JPH0244833Y2 (en]) * | 1985-09-05 | 1990-11-28 | ||
JPS62252840A (ja) * | 1986-04-24 | 1987-11-04 | Nitta Kk | 筒状のフィルタ装置利用のクリ−ンル−ム |
-
1988
- 1988-01-22 JP JP1988006009U patent/JPH061221Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH01110820U (en]) | 1989-07-26 |
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